Forschungsbereich Mikrosystemtechnik

Organization Name (de) Name der Organisation (de)
E366-02 - Forschungsbereich Mikrosystemtechnik
 
Code Kennzahl
E366-02
 
Type of Organization Organisationstyp
Research Division
Parent OrgUnit Übergeordnete Organisation
 
Active Aktiv
 


Results 61-80 of 1697 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
61Fleckl, Gernot ; Pfusterschmied, Georg ; Schmid, Ulrich Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiCPresentation Vortrag2022
62David, Mauro ; Disnan, Davide ; Lardschneider, Anna ; Wacht, Dominik ; Hoang, Hanh T. ; Ramer, Georg ; Detz, Hermann ; Lendl, Bernhard ; Schmid, Ulrich ; Strasser, Gottfried ; Hinkov, Borislav Structure and mid-infrared optical properties of spin-coated polyethylene films developed for integrated photonics applicationsArtikel Article 2022
63Aguinsky, Luiz Felipe ; Rodrigues, Frâncio ; Wachter, Georg ; Trupke, Michael ; Schmid, Ulrich ; Hössinger, Andreas ; Weinbub, Josef Phenomenological Modeling of Low-Bias Sulfur Hexafluoride Plasma Etching of SiliconArtikel Article 2022
64Pandit-2022-Advanced Electronic Materials-vor.pdf.jpgPandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schwarz, Sabine ; Schmid, Ulrich Impact of AlN Seed Layer on Microstructure and Piezoelectric Properties of YₓAl₁−ₓN (x = 15%) Thin FilmsArticle Artikel 2022
65Schlögl, Matthias ; Schneider, Michael ; Schmid, Ulrich Piezoelectricity in Y₀.₀₉Al₀.₉₁N thin filmsArticle Artikel 29-Nov-2021
66Haus, Jan Niklas ; Schwerter, Martin ; Schneider, Michael ; Gäding, Marcel ; Leester-Schädel, Monika ; Schmid, Ulrich ; Dietzel, Andreas Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil IntegrationArtikel Article 2021
67Khanmohammadi, Akbar ; Afkhami, Abbas ; Hajian, Ali ; Khoshsafar, Hosein ; Bagheri, Hasan Electrochemical sandwich-type immunosensor for the detection of PSA based on a trimetallic AgAuPt nanocomposite synthesized using the galvanic replacement reactionArtikel Article 2021
68Bordbar, Mohammad Mahdi ; Sheini, Azarmidokht ; Hashemi, Pegah ; Hajian, Ali ; Bagheri, Hasan Disposable paper-based biosensors for the point-of-care detection of hazardous contaminations-A reviewArtikel Article 2021
69Khoshfetrat, Seyyed Mehdi ; Hashemi, Pegah ; Afkhami, Abbas ; Hajian, Ali ; Bagheri, Hasan Cascade electrochemiluminescence-based integrated graphitic carbon nitride-encapsulated metal-organic framework nanozyme for prostate-specific antigen biosensingArtikel Article 2021
70Triendl, F ; Pfusterschmied, G ; Schwarz, S ; Pobegen, G ; Konrath, J P ; Schmid, U Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodesArtikel Article 2021
71Maier, F. J. ; Schneider, M. ; Ullmann, P. ; Hafner, J. ; Schmid, U. α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometryArtikel Article 2021
72Pfusterschmied, G. ; Triendl, F. ; Schneider, M. ; Schmid, U. Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heightsArtikel Article 2021
73Hoang, Hanh Thi ; David, Mauro ; Disnan, Davide ; Doganlar, Ismail Cem ; Detz, Hermann ; Schmid, Ulrich ; Strasser, Gottfried ; Hinkov, Borislav Modelling, fabrication and characterization of low-density polyethylene based plasmonic waveguides for mid-IR photonic networksKonferenzbeitrag Inproceedings2021
74Hajian, Ali ; Artemenko, A. ; Kromka, A. ; Bechtold, F. ; Schmid, Ulrich Fundamental Studies on Crystallization Behaviour and Surface Characteristics of LTCC Substrate MaterialsPräsentation Presentation2021
75Goekdeniz, Zeynep ; Lederer, Martin ; Khatibi, Golta ; Nicolics, Johann Temperature Dependent Relaxation Behavior of Pressureless and Pressure Assisted Sintered SilverKonferenzbeitrag Inproceedings2021
76Hajian, Ali ; Konegger, Thomas ; Bielecki, Thomas ; Mieller, Bjoern ; Rabe, Torsten ; Schwarz, Sabine ; Zellner, Christoph ; Schmid, Ulrich Wet chemical porosification with phosphate buffer solutions for permittivity reduction of LTCC substratesArtikel Article 2021
77Watanabe, Hitomi ; Chang, Tso-Fu Mark ; Schneider, Michael ; Schmid, Ulrich ; Chen, Chun-Yi ; Iida, Shinichi ; Yamane, Daisuke ; Ito, Hiroyuki ; Machida, Katsuyuki ; Masu, Kazuya ; Sone, Masato Effective Young's Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature DependencyArtikel Article 2021
78Lederer, M. ; Gökdeniz, Z. ; Khatibi, G. ; Nicolics, J. Constitutive equations for strain rate and temperature dependent mechanical behaviour of porous Ag-sintered joints in electronic packagesArtikel Article 2021
79Triendl, Fabian ; Pfusterschmied, Georg ; Berger, Claudio ; Schwarz, Sabine ; Artner, Werner ; Schmid, Ulrich Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layerArtikel Article 2021
80Triendl, F. ; Pfusterschmied, G. ; Pobegen, G. ; Schwarz, S. ; Artner, W. ; Konrath, J.P. ; Schmid, U. Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiCArtikel Article 2021