Wanzenböck, Heinz

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Wanzenböck, Heinz
 
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Results 161-180 of 235 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
161Waid, Simon ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich ; Mühlberger, Michael 3D Nano Patterning using Local Ga Implantation and Subsequent RIE EtchPräsentation Presentation2011
162Waid, Simon ; Wanzenböck, Heinz D. ; Mühlberger, Michael ; Bertagnolli, Emmerich Method for 3D Nanoimprint Lithography Stamp FabricationPräsentation Presentation2011
163Waid, Simon ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Direct Hard Mask Patterning by Focused Ion BeamPräsentation Presentation2011
164Waid, Simon ; Wanzenböck, Heinz D. FIB-implantation for Ga hardmask generation - a new approach for NIL-stamp fabricationPräsentation Presentation2011
165Roediger, P ; Wanzenboeck, H D ; Waid, S ; Hochleitner, G ; Bertagnolli, E Focused-ion-beam-inflicted surface amorphization and gallium implantation-new insights and removal by focused-electron-beam-induced etchingArtikel Article 2011
166Roediger, Peter ; Wanzenboeck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etchingArtikel Article 2011
167Wanzenböck, Heinz D. ; Waid, Simon Focused Ion Beam LithographyBuchbeitrag Book Contribution2011
168Ebm, Christoph ; Hobler, Gerhard ; Waid, Simon ; Wanzenboeck, Heinz D. Quantitative simulation of ion-beam induced deposition of nanostructuresArtikel Article 2011
169Deutschinger, A. ; Schmid, U. ; Schneider, M. ; Brenner, W. ; Wanzenböck, H. ; Volland, B. ; Ivanov, Tzv. ; Rangelow, I. W. Characterization of an electro-thermal micro gripper and tip sharpening using FIB techniqueArtikel Article2010
170Hochleitner, Gottfried ; Hörtlackner, Michael ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Experimental evaluation of gas-flux distribution with gas injection systems for focused beam induced depositionKonferenzbeitrag Inproceedings2010
171Hochleitner, Gottfried ; Hörtlackner, Michael ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Thermally assisted focused electron beam induced depositionKonferenzbeitrag Inproceedings2010
172Hochleitner, Gottfried ; Lugstein, Alois ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Nanowire Synthesis on catalyst arrays produced with electron beam induced depositionKonferenzbeitrag Inproceedings2010
173Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich New Approach for Cleaning a SEM Chamber from Hydrocarbon ContaminationPräsentation Presentation2010
174Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Electron beam induced etching of silicon using chlorine gasPräsentation Presentation2010
175Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Etching of Silicon by Chlorine Gas using a Focused Electron BeamPräsentation Presentation2010
176Roediger, P. ; Wanzenboeck, H. D. ; Hochleitner, G. ; Bertagnolli, E. ; Buehler, W. Focused electron beam induced etching of silicon by chlorine gas: Negative effects of residual gas contamination on the etching processArtikel Article 2010
177Wanzenboeck, H. D. ; Roediger, P. ; Hochleitner, G. ; Bertagnolli, E. ; Buehler, W. Novel method for cleaning a vacuum chamber from hydrocarbon contaminationArtikel Article 2010
178Roediger, P ; Hochleitner, G ; Bertagnolli, E ; Wanzenboeck, H D ; Buehler, W Focused electron beam induced etching of silicon using chlorineArtikel Article 2010
179Hochleitner, Gottfried ; Steinmair, Mathias ; Lugstein, Alois ; Roediger, Peter ; Wanzenboeck, Heinz D ; Bertagnolli, Emmerich Focused electron beam induced deposition of gold catalyst templates for Si-nanowire synthesisArtikel Article 2010
180Waid, Simon ; Kutkurezovic, Sasa ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich ; Mühlberger, Michael ; Schöftner, Rainer Curved And Sloped Nil Stamps Fib As Versatile Approach Towards Complex 3d-Nil StampsKonferenzbeitrag Inproceedings2010