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Münch, M.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Grosser, M. ; Münch, M. ; Seidel, Helmut ; Bienert, C. ; Roosen, A. ; Schmid, Ulrich The impact of substrate properties and thermal annealing on tantalum nitride thin filmsArtikel Article 2012
2Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputteringArtikel Article 2010