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Tran, Tuan Thien

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		Preview	Author(s)	Title	Type	Issue Date
	1		Kretschmer, Andreas ; Bohrn, Fabian ; Hutter, Herbert ; Pitthan, Eduardo ; Tran, Tuan Thien ; Primetzhofer, Daniel ; Mayrhofer, Paul Heinz	Analysis of (Al,Cr,Nb,Ta,Ti)-nitride and -oxynitride diffusion barriers in Cu-Si interconnects by 3D-Secondary Ion Mass Spectrometry	Article Artikel	19-Jan-2023