| Preview | Authors / Editors | Title | Type | Issue Date |
1 | | Beckhoff, B. ; Kolbe, M. ; Müller, M. ; Nutsch, A. ; Altmann, R. ; Borionetti, G. ; Pello, C. ; Polgnano, M.L. ; Codegoni, C. ; Grasso, S. ; Cazzini, E. ; Bersani, M. ; Lazzeri, P. ; Gennaro, S. ; Kregsamer, Peter ; Posch, F. | Investigation of Spin-coated inorganic contamination on Si surfacs by various analytical techniques | Präsentation Presentation | 2010 |
2 | | Beckhoff, B. ; Nutsch, A. ; Altmann, R. ; Borionetti, G. ; Pello, C. ; Polignano, M.L. ; Codegoni, D. ; Grasso, S. ; Cazzini, E. ; Bersani, M. ; Lazzeri, P. ; Gennaro, S. ; Kolbe, M. ; Müller, M. ; Kregsamer, Peter ; Posch, F. | Highly sensitive detection of inorganic contamination | Konferenzbeitrag Inproceedings | 2009 |
3 | | Beckhoff, B. ; Nutsch, A. ; Altmann, R. ; Borionetti, G. ; Pello, C. ; Polignano, M.L. ; Codegoni, D. ; Grasso, S. ; Cazzini, E. ; Bersani, M. ; Gennaro, S. ; Kolbe, M. ; Müller, M. ; Kregsamer, Peter ; Posch, F. | Assessing Various Analytical Techniques With Different Lateral Resolution By Investigating Spin-coated Inorganic Contamination On Si Surfaces | Konferenzbeitrag Inproceedings | 2009 |
4 | | Beckhoff, B. ; Nutsch, A. ; Altmann, R. ; Borionetti, G. ; Pello, C. ; Polignano, M.L. ; Codegoni, D. ; Grasso, S. ; Cazzini, E. ; Bersani, M. ; Lazzeri, P. ; Gennaro, S. ; Kolbe, M. ; Müller, M. ; Kregsamer, Peter ; Posch, F. | Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces | Präsentation Presentation | 2009 |
5 | | Streli, Christina ; Kregsamer, Peter ; Posch, F. ; Fugger, Manfred | Accreditation for wafer surface analysis with TXRF | Bericht Report | 2009 |
6 | | Streli, Christina ; Kregsamer, Peter ; Posch, F. ; Fugger, Manfred | Accreditation for wafer surface analysis with TXRF | Präsentation Presentation | 2009 |
7 | | Streli, Christina ; Posch, F. ; Fugger, Manfred ; Havrilla, G.J. ; Fittschen, U. | Accreditation (EN ISO 17025) for an Atomika 8030W wafer analyzer | Präsentation Presentation | 2009 |