Humlicek, J.

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Humlicek, J.
 

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Results 1-5 of 5 (Search time: 0.002 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Forsich, Christian ; Gebeshuber, I.C. ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. Spectroscopic ellipsometry as an in-situ diagnostic tool for the avoidance of compound layer formation during plasma nitridingKonferenzbeitrag Inproceedings2005
2Forsich, Christian ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. On the spectroscopic ellipsometry for monitoring of diamond-like carbon (DLC) growth during plasma-assisted chemical vapour deposition (PACVD)Konferenzbeitrag Inproceedings2005
3Humlicek, J. Ellipsometry: broadband and fast polarization spectroscopyPräsentation Presentation2003
4Forsich, Christian ; Kolm, Ralph ; Tomastik, Christian ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. Control of the composition of titanium nitride coatings during plasma-assisted chemical vapour deposition by spectroscopic ellipsometryKonferenzbeitrag Inproceedings2005
5Laimer, Johann ; Forsich, Christian ; Humlicek, J. ; Störi, Herbert Closed Loop Control of a Plasma Nitriding Process by Spectroscopic EllipsometryKonferenzbeitrag Inproceedings2006