Full name Familienname, Vorname
Demenev, E.
 

Results 1-10 of 10 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Schiebl, M. ; Giubertoni, D. ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2014
2Ingerle, D. ; Meirer, F. ; Pepponi, G. ; Demenev, E. ; Giubertoni, D. ; Wobrauschek, P. ; Streli, C. Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributionsArtikel Article2014
3Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Schiebl, M. ; Giubertoni, Damiano ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2013
4Pepponi, Giancarlo ; Meirer, F. ; Brigidi, Fabio ; Demenev, E. ; Giubertoni, D. ; Gennaro, S. ; Bersani, M. ; Ingerle, D. ; Streli, Christina ; Steinhauser, Georg ; Mehta, A. ; Pianetta, P. ; Vishwanath, V. ; Foad, M.A. GIXRF and GEXRF analysis of PIII ultra shallow arsenic profiles in SiliconPräsentation Presentation2013
5Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2013
6Meirer, F. ; Demenev, E. ; Giubertoni, D. ; Gennaro, S. ; Vanzetti, L. ; Pepponi, G. ; Bersani, M. ; Sahiner, M. A. ; Steinhauser, G. ; Foad, M. A. ; Woicik, J. C. ; Mehta, A. ; Pianetta, P. Formation Of Arsenic Rich Silicon Oxide Under Plasma Immersion Ion Implantation And Laser AnnealingArtikel Article2012
7Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Demenev, E. ; Giubertoni, D. ; Streli, Christina Modelling shallow dopant distributions as layered samples for grazing incidence x-ray fluorescence analysisPräsentation Presentation2012
8Meirer, F. ; Pepponi, Giancarlo ; Ingerle, D. ; Sahiner, M.A. ; Giubertoni, D. ; Demenev, E. ; Foad, M.A. ; Woicik, J.C. ; Mehta, A. ; Streli, Christina ; Pianetta, P. Characterization of ultra shallow arsenic implants in silicon using grazing incidence and grazing exit x-ray spectroscopyPräsentation Presentation2011
9Pepponi, Giancarlo ; Meirer, F. ; Sahiner, M.A. ; Giubertoni, D. ; Gennaro, S. ; Demenev, E. ; Woicik, J.C. ; Bersani, M. ; Foad, M.A. ; Streli, Christina ; Pianetta, P. GI-EXAFS of Arsenic ultra shallow junctions in Silicon formed by beamline and plasma immersion ion implantation and laser annealingPräsentation Presentation2010
10Pepponi, Giancarlo ; Meirer, F. ; Sahiner, M.A. ; Giubertoni, D. ; Gennaro, S. ; Demenev, E. ; Bersani, M. ; Foad, M.A. ; Streli, Christina ; Pianetta, P. Grazing Incidence X-Ray Absorption Applied To The Characterisation Of As Shallow Implants In SiPräsentation Presentation2010