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Pitthan, Eduardo

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		Preview	Author(s)	Title	Type	Issue Date
	1		Kretschmer, Andreas ; Bohrn, Fabian ; Hutter, Herbert ; Pitthan, Eduardo ; Tran, Tuan Thien ; Primetzhofer, Daniel ; Mayrhofer, Paul Heinz	Analysis of (Al,Cr,Nb,Ta,Ti)-nitride and -oxynitride diffusion barriers in Cu-Si interconnects by 3D-Secondary Ion Mass Spectrometry	Article Artikel	19-Jan-2023
	2		Bahr, Ahmed ; Glechner, Thomas ; Wojcik, Tomasz ; Kirnbauer, Alexander ; Sauer, Markus ; Foelske-Schmitz, Annette ; Hunold, Oliver ; Ramm, JÃ¼rgen ; KolozsvÃ¡ri, SzilÃ¡rd ; Ntemou, E. ; Pitthan, Eduardo ; Primetzhofer, Daniel ; Riedl-Tragenreif, Helmut ; Hahn, Rainer	Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties	Artikel Article	25-Aug-2022