DC FieldValueLanguage
dc.contributor.advisorLaimer, Johann-
dc.contributor.authorFink, Markus-
dc.date.accessioned2020-06-30T11:04:54Z-
dc.date.issued2003-
dc.identifier.urihttps://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-10901-
dc.identifier.urihttp://hdl.handle.net/20.500.12708/12149-
dc.descriptionZsfassung in engl. Sprache-
dc.format191 Bl.-
dc.languageDeutsch-
dc.language.isode-
dc.subjectAluminiumoxidede
dc.subjectPECVD-Verfahrende
dc.titleAluminiumoxidabscheidung durch Plasma - CVDde
dc.typeThesisen
dc.typeHochschulschriftde
tuw.publication.orgunitE134 - Institut für Allgemeine Physik-
dc.type.qualificationlevelDoctoral-
dc.identifier.libraryidAC04053891-
dc.description.numberOfPages191-
dc.identifier.urnurn:nbn:at:at-ubtuw:1-10901-
dc.thesistypeDissertationde
dc.thesistypeDissertationen
item.languageiso639-1de-
item.openairetypeThesis-
item.openairetypeHochschulschrift-
item.fulltextwith Fulltext-
item.cerifentitytypePublications-
item.cerifentitytypePublications-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextopen-
Appears in Collections:Thesis

Files in this item:

Show simple item record

Page view(s)

14
checked on Feb 18, 2021

Download(s)

57
checked on Feb 18, 2021

Google ScholarTM

Check


Items in reposiTUm are protected by copyright, with all rights reserved, unless otherwise indicated.