DC FieldValueLanguage
dc.contributor.advisorBertagnolli, Emmerich-
dc.contributor.authorLangfischer, Helmut-
dc.date.accessioned2020-06-30T11:08:41Z-
dc.date.issued2003-
dc.identifier.urihttps://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-11259-
dc.identifier.urihttp://hdl.handle.net/20.500.12708/12166-
dc.descriptionZsfassung in engl. Sprache-
dc.formatVI, 129 S.-
dc.languageDeutsch-
dc.language.isode-
dc.subjectBauelementde
dc.subjectMetallisierende
dc.subjectWolframde
dc.subjectIonenplattierende
dc.subjectGalliumionde
dc.titleFocused Ion Beam basierte Metallisierung für sub - 100nm - Bauelementede
dc.typeThesisen
dc.typeHochschulschriftde
tuw.publication.orgunitE362 - Institut für Festkörperelektronik-
dc.type.qualificationlevelDoctoral-
dc.identifier.libraryidAC04080670-
dc.description.numberOfPages129-
dc.identifier.urnurn:nbn:at:at-ubtuw:1-11259-
dc.thesistypeDissertationde
dc.thesistypeDissertationen
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openaccessfulltextOpen Access-
item.openairetypeThesis-
item.openairetypeHochschulschrift-
item.fulltextwith Fulltext-
item.languageiso639-1de-
item.grantfulltextopen-
item.cerifentitytypePublications-
item.cerifentitytypePublications-
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