The characterization of layered structures from the nanometer range to the 10 µm range is of increasing importance, especially if the analytical methods are non-destructive. In the first part Confocal micro-XRF (X-ray fluorescence analysis) is introduced by Christina Streli. This technique allows the characterization of layers in the range of some 10 µm. The principle, some experimental setups (synchrotron radiation as well as lab instruments) will be described and some showcases presented. In the second part GIXA, the combination of Grazing incidence XRF (GIXRF) and X-ray reflectivity (XRR), is presented by Dieter Ingerle. GIXA allows the characterization of nanometer layers, the determination of the elemental composition, density and thickness. Setups, data evaluation software and showcases are presented. The third part of the workshop, presented by Klaudia Hradil, will include the theoretical background and experimental techniques of thin film analysis by X-ray diffraction methods. This will include the experimental techniques and the analysis of data for grazing incidence diffraction. The possibilities for the microstructure properties analysis of thin films like stress/strain and texture analysis, classical phase analysis and thin film crystallinity properties with lab methods will be introduced for selected examples
