<div class="csl-bib-body">
<div class="csl-entry">Bretschneider, T., Rauwolf, M., Ingerle, D., Wobrauschek, P., & Streli, C. (2022, June 28). <i>Characterization of light element nanolayers by GIXRF in combination with JGIXA software</i> [Poster Presentation]. EXRS 2022 - European X-ray Spectrometry Conference, Brügge, Belgium.</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/136306
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dc.description.abstract
GI-XRF is a non-destructive analytical method by which nanolayers can be characterized in terms of elemental composition, thickness and density by fitting theoretical curves to measured, angle dependent fluorescence signals. When Measuring X-Ray fluorescence of low Z elements it is important, due to low energies and intensities, to reduce absorption as much as possible. Therefore it is needed to perform analysis under vacuum using a detector equipped with an ultra-thin-window (UTW).
In order to show the usability of the low Z TXRF spectrometer of Atominstitut, TU Wien for characterization of low Z nanolayers by GI-XRF, multiple samples were measured including three Ti monolayers and one stack of organic layers containing F with a nominal thickness of 2, 10, 20 and 60nm respectively. Quantification was performed by fitting theoretical curves to the measured X-Ray fluorescence signals, of elements present in layers and substrate, by variation of parameters via differential evolution algorithm with JGIXA software [1].
Measurements were performed with the low Z TXRF Spectrometer of Atominstitut, TU Wien which provides ideal conditions for detection of light elements. Excitation was provided by a 1300W Cr-tube. ML monochromator, a 20mm2 SDD detector with an UTW and a sample stage are housed within a vacuum chamber. Motorized rotation of the sample stage allows for the performance of GI-XRF measurements with this setup.
It was shown that nanolayers containing Ti and F can be successfully quantified by using GI- XRF measurements of their low Z components in combination with JGIXA software, the results will be presented.
[1] D. Ingerle, G. Pepponi, F. Meirer, P. Wobrauschek, C.Streli, Spectrochimica Acta Part B vol. 118, 2016, 20.
en
dc.language.iso
en
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dc.subject
GIXRF
en
dc.subject
low Z elements
en
dc.title
Characterization of light element nanolayers by GIXRF in combination with JGIXA software
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Poster Presentation
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchTopic.id
M2
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tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.value
100
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tuw.publication.orgunit
E141 - Atominstitut
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tuw.publication.orgunit
E057-04 - Fachbereich Röntgenzentrum
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tuw.publication.orgunit
E141-05 - Forschungsbereich Radiation Physics
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tuw.author.orcid
0000-0003-2686-7641
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tuw.author.orcid
0000-0002-3699-3003
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tuw.author.orcid
0000-0002-5141-3177
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tuw.event.name
EXRS 2022 - European X-ray Spectrometry Conference
