<div class="csl-bib-body">
<div class="csl-entry">Kainz, A., Beigelbeck, R., & Schmid, S. (2021). Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers. <i>Frontiers of Mechanical Engineering</i>, <i>6</i>, Article 611590. https://doi.org/10.3389/fmech.2020.611590</div>
</div>
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dc.identifier.issn
2095-0233
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/137355
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dc.language.iso
en
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dc.publisher
HIGHER EDUCATION PRESS
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dc.relation.ispartof
Frontiers of Mechanical Engineering
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dc.subject
Computer Science Applications
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dc.subject
Mechanical Engineering
-
dc.subject
General Materials Science
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dc.subject
Industrial and Manufacturing Engineering
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dc.title
Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers
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dc.type
Artikel
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dc.type
Article
en
dc.type.category
Original Research Article
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tuw.container.volume
6
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true
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true
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tuw.researchTopic.id
M2
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M7
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tuw.researchTopic.id
I8
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tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.name
Special and Engineering Materials
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
20
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tuw.researchTopic.value
35
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tuw.researchTopic.value
45
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dcterms.isPartOf.title
Frontiers of Mechanical Engineering
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tuw.publication.orgunit
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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tuw.publisher.doi
10.3389/fmech.2020.611590
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dc.identifier.articleid
611590
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dc.identifier.eissn
2095-0241
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dc.description.numberOfPages
9
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wb.sci
true
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch
Physik, Astronomie
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.oefos
1030
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wb.facultyfocus
Mikro- und Nanoelektronik
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wb.facultyfocus
Micro- and Nanoelectronics
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wb.facultyfocus.faculty
E350
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research article
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en
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Publications
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no Fulltext
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crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
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crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
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crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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0000-0002-8630-777X
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0000-0003-3778-7137
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E350 - Fakultät für Elektrotechnik und Informationstechnik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
