<div class="csl-bib-body">
<div class="csl-entry">Nieuwenhuis, J. H. (2005). <i>Microsystems for particle analysis</i> [Dissertation, Technische Universität Wien]. reposiTUm. https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-19375</div>
</div>
The thesis discusses the development of four new microsystems for the analysis of small particles (diameter 5-50 µm). The microsystems have been designed to take advantage of the unique physics found at the micro-scale. IC-technology has been used to fabricate the microsystems on a common silicon-glass platform.
de
dc.language
English
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dc.language.iso
en
-
dc.rights.uri
http://rightsstatements.org/vocab/InC/1.0/
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dc.subject
Mikrosystemtechnik
de
dc.subject
Teilchen
de
dc.subject
Mikrometerbereich
de
dc.subject
Analyse
de
dc.title
Microsystems for particle analysis
en
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.rights.license
In Copyright
en
dc.rights.license
Urheberrechtsschutz
de
dc.contributor.affiliation
TU Wien, Österreich
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dc.rights.holder
Jeroen Hans Nieuwenhuis
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tuw.version
vor
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tuw.thesisinformation
Technische Universität Wien
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dc.contributor.assistant
Vellekoop, Michael J.
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tuw.publication.orgunit
E366 - Institut für Sensor- und Aktuatorsysteme
-
dc.type.qualificationlevel
Doctoral
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dc.identifier.libraryid
AC04582902
-
dc.description.numberOfPages
99
-
dc.identifier.urn
urn:nbn:at:at-ubtuw:1-19375
-
dc.thesistype
Dissertation
de
dc.thesistype
Dissertation
en
dc.rights.identifier
In Copyright
en
dc.rights.identifier
Urheberrechtsschutz
de
item.languageiso639-1
en
-
item.openairetype
doctoral thesis
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item.grantfulltext
open
-
item.fulltext
with Fulltext
-
item.cerifentitytype
Publications
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item.mimetype
application/pdf
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item.openairecristype
http://purl.org/coar/resource_type/c_db06
-
item.openaccessfulltext
Open Access
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
