DC FieldValueLanguage
dc.contributor.advisorTelleman, P.-
dc.contributor.authorNieuwenhuis, Jeroen Hans-
dc.date.accessioned2020-06-30T19:48:02Z-
dc.date.issued2005-
dc.identifier.urihttps://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-19375-
dc.identifier.urihttp://hdl.handle.net/20.500.12708/13879-
dc.descriptionZsfassung in dt. Sprache-
dc.description.abstractThe thesis discusses the development of four new microsystems for the analysis of small particles (diameter 5-50 µm). The microsystems have been designed to take advantage of the unique physics found at the micro-scale. IC-technology has been used to fabricate the microsystems on a common silicon-glass platform.de
dc.formatIX, 99 Bl.-
dc.languageEnglish-
dc.language.isoen-
dc.subjectMikrosystemtechnikde
dc.subjectTeilchende
dc.subjectMikrometerbereichde
dc.subjectAnalysede
dc.titleMicrosystems for particle analysisen
dc.typeThesisen
dc.typeHochschulschriftde
dc.contributor.assistantVellekoop, Michael J.-
tuw.publication.orgunitE366 - Institut für Sensor- und Aktuatorsysteme-
dc.type.qualificationlevelDoctoral-
dc.identifier.libraryidAC04582902-
dc.description.numberOfPages99-
dc.identifier.urnurn:nbn:at:at-ubtuw:1-19375-
dc.thesistypeDissertationde
dc.thesistypeDissertationen
item.fulltextwith Fulltext-
item.openairetypeThesis-
item.openairetypeHochschulschrift-
item.cerifentitytypePublications-
item.cerifentitytypePublications-
item.languageiso639-1en-
item.grantfulltextopen-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
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