<div class="csl-bib-body">
<div class="csl-entry">Bahr, A. A. I., Hahn, R., Wojcik, T., Kozák, T., Kirnbauer, A., Ramm, J., Koloszvári, S., Pitthan, E., Ntemou, E., Primetzhofer, D., Zeman, P., & Riedl-Tragenreif, H. (2022, September 14). <i>Non-reactive HiPIMS deposition of Nb-C coatings</i> [Conference Presentation]. 18th International Conference on Plasma Surface Engineering (PSE 2022), Erfurt, Germany. http://hdl.handle.net/20.500.12708/139367</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/139367
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dc.description.abstract
Physical vapor deposited transition metal carbide (TMC) based thin films are known to form nanocomposite microstructures comprised of nanocrystalline metal carbide grains embedded into an amorphous C matrix. The structural and mechanical properties of NbC films are strongly influenced by the carbon content determined by the C/Me ratio and the morphology. Here, we employed high power pulsed magnetron sputtering (HiPIMS) to deposit extremely hard NbC thin films and investigated the influence of the deposition parameters on the microstructure, mechanical properties and fracture behavior. Through tuning the HiPIMS pulse parameters (ton, f), a variation in the target power density from 0.17 to 1.2 kW/cm2 was achieved. This wide variation allows for a control over the stoichiometry, as well as the microstructure of the NbC films, that leading to a wide variation range of the mechanical properties. A time- and energy-resolved mass spectroscopy analysis of the ion fluxes was employed to explain the observed changes in film composition and mechanical properties.
en
dc.description.sponsorship
CDG Christian Doppler Forschungsgesellschaft
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dc.language.iso
en
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dc.subject
NbC
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dc.subject
nanocomposite
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dc.subject
HiPIMS
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dc.subject
mechanical properties
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dc.subject
microstructure
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dc.title
Non-reactive HiPIMS deposition of Nb-C coatings
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dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
Department of Physics and NTIS – European Centre of Excellence, University of West Bohemia
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dc.contributor.affiliation
TU Wien
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dc.contributor.affiliation
Oerlikon Surface Solutions AG
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dc.contributor.affiliation
Plansee Composite Materials GmbH
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dc.contributor.affiliation
Uppsala University, Schweden
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dc.contributor.affiliation
Uppsala University, Schweden
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dc.contributor.affiliation
Uppsala University, Schweden
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dc.contributor.affiliation
Department of Physics and NTIS – European Centre of Excellence, University of West Bohemia
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dc.relation.grantno
CDL-SEC
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dc.type.category
Conference Presentation
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tuw.project.title
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchinfrastructure
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie