DC Field
Value
Language
dc.contributor.author
Berens, Judith Veronika
-
dc.contributor.author
Pobegen, Gregor
-
dc.contributor.author
Grasser, Tibor
-
dc.date.accessioned
2023-01-19T14:01:24Z
-
dc.date.available
2023-01-19T14:01:24Z
-
dc.date.issued
2020-07
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Berens, J. V., Pobegen, G., &#38; Grasser, T. (2020). Tunneling Effects in NH₃ Annealed 4H-SiC Trench MOSFETs. <i>Materials Science Forum</i>, <i>1004</i>, 652–658. https://doi.org/10.4028/www.scientific.net/msf.1004.652</div> </div>
-
dc.identifier.issn
0255-5476
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/141634
-
dc.language.iso
en
-
dc.publisher
Trans Tech Publications Ltd.
-
dc.relation.ispartof
Materials Science Forum
-
dc.subject
Mechanical Engineering
-
dc.subject
Mechanics of Materials
-
dc.subject
Condensed Matter Physics
-
dc.subject
General Materials Science
-
dc.title
Tunneling Effects in NH₃ Annealed 4H-SiC Trench MOSFETs
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
652
-
dc.description.endpage
658
-
dc.type.category
Original Research Article
-
tuw.container.volume
1004
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.value
100
-
dcterms.isPartOf.title
Materials Science Forum
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
tuw.publisher.doi
10.4028/www.scientific.net/msf.1004.652
-
dc.identifier.eissn
1662-9752
-
dc.description.numberOfPages
7
-
tuw.author.orcid
0000-0001-5611-7564
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch
Nanotechnologie
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.oefos
2100
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.languageiso639-1
en
-
item.openairetype
research article
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_2df8fbb1
-
crisitem.author.dept
TU Wien
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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