<div class="csl-bib-body">
<div class="csl-entry">Simonka, V., Hössinger, A., Weinbub, J., & Selberherr, S. (2018). Empirical Model for Electrical Activation of Aluminum- and Boron-Implanted Silicon Carbide. <i>IEEE Transactions on Electron Devices</i>, <i>65</i>(2), 674–679. https://doi.org/10.1109/ted.2017.2786086</div>
</div>
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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Electronic, Optical and Magnetic Materials
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Empirical Model for Electrical Activation of Aluminum- and Boron-Implanted Silicon Carbide
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674
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679
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