<div class="csl-bib-body">
<div class="csl-entry">Stadlmayr, R., Szabo, P. S., Berger, B. M., Cupak, C., Chiba, R., Blöch, D., Mayer, D., Stechauner, B., Sauer, M., Foelske-Schmitz, A., Oberkofler, M., Schwarz-Selinger, T., Mutzke, A., & Aumayr, F. (2018). Fluence dependent changes of surface morphology and sputtering yield of iron: comparison of experiments with SDTrimSP-2D. <i>NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS</i>, <i>430</i>, 42–46. https://doi.org/10.1016/j.nimb.2018.06.004</div>
</div>
-
dc.identifier.issn
0168-583X
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/145092
-
dc.description.abstract
The influence of surface morphology modifications on the sputtering yield of thin Fe films by monoenergetic Ar ions is studied by using a highly sensitive quartz crystal microbalance (QCM) technique. The morphology changes are induced by prolonged sputtering up to a total Ar fluence of 8 × 1021 m−2. Atomic force microscopy (AFM) measurements are performed to analyse the sample topography before and after irradiation and to de- termine surface roughness parameters. Numerical modelling with the codes SDTrimSP and SDTrimSP-2D are performed for comparison. Our investigations show that by using the local distribution of projectile impact angles, as derived from AFM measurements, as well as the elemental composition of the samples as an input to the codes SDTrimSP and SDTrimSP-2D the agreement between experiment and simulations is substantially improved.
en
dc.language.iso
en
-
dc.publisher
ELSEVIER
-
dc.relation.ispartof
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
-
dc.subject
Instrumentation
en
dc.subject
Nuclear and High Energy Physics
en
dc.subject
Sputtering Erosion Quartz-crystal-microbalance Surface roughness Trim
en
dc.title
Fluence dependent changes of surface morphology and sputtering yield of iron: comparison of experiments with SDTrimSP-2D
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
42
-
dc.description.endpage
46
-
dc.type.category
Original Research Article
-
tuw.container.volume
430
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.value
100
-
dcterms.isPartOf.title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
-
tuw.publication.orgunit
E134-03 - Forschungsbereich Atomic and Plasma Physics
-
tuw.publication.orgunit
E057E - Fachbereich Analytical Instrumentation Center
-
tuw.publisher.doi
10.1016/j.nimb.2018.06.004
-
dc.identifier.eissn
1872-9584
-
dc.description.numberOfPages
5
-
wb.sci
true
-
wb.sciencebranch
Physik, Astronomie
-
wb.sciencebranch.oefos
1030
-
wb.facultyfocus
Physikalische Technologie
de
wb.facultyfocus
Physical Technology
en
wb.facultyfocus.faculty
E130
-
item.grantfulltext
none
-
item.openairetype
research article
-
item.fulltext
no Fulltext
-
item.languageiso639-1
en
-
item.openairecristype
http://purl.org/coar/resource_type/c_2df8fbb1
-
item.cerifentitytype
Publications
-
crisitem.author.dept
E134-03 - Forschungsbereich Atomic and Plasma Physics
-
crisitem.author.dept
E134-03 - Forschungsbereich Atomic and Plasma Physics
