<div class="csl-bib-body">
<div class="csl-entry">Kainz, A. F. H., Hortschitz, W., Steiner, H., Schalko, J., Jachimowicz, A., & Keplinger, F. (2017). Accurate Analytical Model for Air Damping in Lateral MEMS/MOEMS Oscillators. <i>Sensors and Actuators A: Physical</i>, <i>255</i>, 154–159. https://doi.org/10.1016/j.sna.2016.12.023</div>
</div>
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dc.identifier.issn
0924-4247
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http://hdl.handle.net/20.500.12708/146315
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dc.publisher
ELSEVIER SCIENCE SA
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dc.relation.ispartof
Sensors and Actuators A: Physical
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dc.subject
Electrical and Electronic Engineering
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dc.subject
Condensed Matter Physics
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dc.subject
Electronic, Optical and Magnetic Materials
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dc.subject
Instrumentation
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dc.subject
Surfaces, Coatings and Films
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dc.subject
Metals and Alloys
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dc.title
Accurate Analytical Model for Air Damping in Lateral MEMS/MOEMS Oscillators
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dc.type
Artikel
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dc.type
Article
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dc.description.startpage
154
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159
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Original Research Article
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255
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Sensor Systems
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Special and Engineering Materials
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Materials Characterization
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Sensors and Actuators A: Physical
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E366-01 - Forschungsbereich Mikro- und Nanosensorik
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E366-50 - Services des Instituts
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10.1016/j.sna.2016.12.023
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Micro- and Nanoelectronics
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E350
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E366 - Institut für Sensor- und Aktuatorsysteme
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E366 - Institut für Sensor- und Aktuatorsysteme
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E366 - Institut für Sensor- und Aktuatorsysteme
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E366-50 - Services des Instituts
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E366 - Institut für Sensor- und Aktuatorsysteme
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E366-01 - Forschungsbereich Mikro- und Nanosensorik
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E350 - Fakultät für Elektrotechnik und Informationstechnik
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E350 - Fakultät für Elektrotechnik und Informationstechnik