DC Element
Wert
Sprache
dc.contributor.author
Rafiee, Peyman
-
dc.contributor.author
Khatibi, Golta
-
dc.contributor.author
Zehetbauer, Michael
-
dc.date.accessioned
2023-02-02T08:01:36Z
-
dc.date.available
2023-02-02T08:01:36Z
-
dc.date.issued
2017-01-03
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Rafiee, P., Khatibi, G., &#38; Zehetbauer, M. (2017). A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS). <i>Microelectronics International</i>, <i>34</i>(1), 9–21. https://doi.org/10.1108/mi-03-2015-0026</div> </div>
-
dc.identifier.issn
1356-5362
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/147406
-
dc.language.iso
en
-
dc.relation.ispartof
Microelectronics International
-
dc.subject
Electrical and Electronic Engineering
-
dc.subject
Condensed Matter Physics
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.subject
Atomic and Molecular Physics, and Optics
-
dc.subject
Surfaces, Coatings and Films
-
dc.title
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
-
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
9
-
dc.description.endpage
21
-
dc.type.category
Original Research Article
-
tuw.container.volume
34
-
tuw.container.issue
1
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.name
Special and Engineering Materials
-
tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
dcterms.isPartOf.title
Microelectronics International
-
tuw.publication.orgunit
E164 - Institut für Chemische Technologien und Analytik
-
tuw.publisher.doi
10.1108/mi-03-2015-0026
-
dc.identifier.eissn
1758-812X
-
dc.description.numberOfPages
13
-
tuw.author.orcid
0000-0001-8430-8587
-
wb.sci
true
-
wb.sciencebranch
Chemie
-
wb.sciencebranch
Physik, Astronomie
-
wb.sciencebranch.oefos
1040
-
wb.sciencebranch.oefos
1030
-
wb.facultyfocus
Chemistry and Technology of Materials
de
wb.facultyfocus
Chemistry and Technology of Materials
en
wb.facultyfocus.faculty
E150
-
item.languageiso639-1
en
-
item.grantfulltext
none
-
item.cerifentitytype
Publications
-
item.openairetype
research article
-
item.openairecristype
http://purl.org/coar/resource_type/c_2df8fbb1
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E164 - Institut für Chemische Technologien und Analytik
-
crisitem.author.orcid
0000-0001-8430-8587
-
crisitem.author.parentorg
E150 - Fakultät für Technische Chemie
-
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