<div class="csl-bib-body">
<div class="csl-entry">Shawrav, M. M., Gökdeniz, Z. G., Wanzenboeck, H. D., Taus, P., Mika, J. K., Waid, S., & Bertagnolli, E. (2016). Chlorine based focused electron beam induced etching: A novel way to pattern germanium. <i>Materials Science in Semiconductor Processing</i>, <i>42</i>, 170–173. https://doi.org/10.1016/j.mssp.2015.08.033</div>
</div>
-
dc.identifier.issn
1369-8001
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/148376
-
dc.language.iso
en
-
dc.publisher
ELSEVIER SCI LTD
-
dc.relation.ispartof
Materials Science in Semiconductor Processing
-
dc.subject
Mechanical Engineering
-
dc.subject
Mechanics of Materials
-
dc.subject
Condensed Matter Physics
-
dc.subject
General Materials Science
-
dc.title
Chlorine based focused electron beam induced etching: A novel way to pattern germanium
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
170
-
dc.description.endpage
173
-
dc.type.category
Original Research Article
-
tuw.container.volume
42
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.value
25
-
tuw.researchTopic.value
25
-
tuw.researchTopic.value
50
-
dcterms.isPartOf.title
Materials Science in Semiconductor Processing
-
tuw.publication.orgunit
E362 - Institut für Festkörperelektronik
-
tuw.publisher.doi
10.1016/j.mssp.2015.08.033
-
dc.identifier.eissn
1873-4081
-
dc.description.numberOfPages
4
-
wb.sci
true
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.fulltext
no Fulltext
-
item.grantfulltext
none
-
item.languageiso639-1
en
-
item.openairetype
Artikel
-
item.openairetype
Article
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E164-03-2 - Forschungsgruppe Mechanische Eigenschaften und Zuverlässigkeit
