<div class="csl-bib-body">
<div class="csl-entry">Nazzari, D., Solfronk, O., Sistani, M., & Weber, W. M. (2022, September 13). <i>Fabrication and evaluation of different passivation layers for the Ge-Insulator interface using Plasma-Enhanced ALD</i> [Poster Presentation]. 19th Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST-19), Mondsee, Austria.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/152446
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dc.language.iso
en
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dc.subject
Ge-insulator
en
dc.subject
ALD
en
dc.subject
plasma-enhanced
en
dc.subject
interface
en
dc.title
Fabrication and evaluation of different passivation layers for the Ge-Insulator interface using Plasma-Enhanced ALD