<div class="csl-bib-body">
<div class="csl-entry">Zauner, L., Bahr, A. A. I., Kozák, T., Capek, J., Wojcik, T., Hunold, O., Koloszvári, S., Zeman, P., Mayrhofer, P. H., & Riedl-Tragenreif, H. (2022, January 25). <i>Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films</i> [Conference Presentation]. HiPIMS Today, -, Unknown. http://hdl.handle.net/20.500.12708/152847</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/152847
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dc.description.abstract
Time-averaged and time-resolved ion fluxes during reactive HiPIMS deposition of Ti1-xAlxN thin films are thoroughly investigated for the usage of Ti1-xAlx composite targets – Al/(Ti+Al) ratio x = 0.4 and 0.6. Ion mass spectroscopy analysis revealed, that increasing x in the target material or reducing the N2 flow-rate ratio leads to a proportional increase of the Al+-ion count fraction, whereas that of Tin+-ions (n = 1, 2) remains unaffected despite of comparable primary ionisation energies between Al and Ti. In fact, energetic Ti2+-ions account for the lowest flux fraction incident on the substrate surface, allowing for a high Al-solubility limit in cubic-structured Ti1-xAlxN thin films (xmax~0.63). In addition, time-resolved plasma analysis highlights the simultaneous arrival of metal- and process-gas-ions throughout the entire HiPIMS pulse duration. These ion-bombardment conditions, which were dominated by gas-ion irradiation with a significant contribution of Al+-ions (up to ~20 %) and negligible energetic Ti2+-ions, allowed for the growth of cubic Ti0.37Al0.63N coatings exhibiting high hardness of up to ~36 GPa at a low compressive stress level (σ = -1.3 GPa).
en
dc.description.sponsorship
CDG Christian Doppler Forschungsgesellschaft
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dc.language.iso
en
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dc.subject
Ti-Al-N
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dc.subject
HiPIMS
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dc.subject
thin films
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dc.subject
mass spectroscopy
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dc.subject
time-resolved
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dc.title
Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films
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dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
University of West Bohemia, Czechia
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dc.contributor.affiliation
University of West Bohemia, Czechia
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dc.contributor.affiliation
Oerlikon (Liechtenstein), Liechtenstein
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dc.contributor.affiliation
Plansee (Germany), Germany
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dc.contributor.affiliation
University of West Bohemia, Czechia
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dc.relation.grantno
CDL-SEC
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dc.type.category
Conference Presentation
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tuw.publication.invited
invited
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tuw.project.title
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchinfrastructure
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie
