<div class="csl-bib-body">
<div class="csl-entry">Bahr, A. A. I., Richter, S., Wojcik, T., Ramm, J., Hunold, O., Koloszvári, S., & Riedl-Tragenreif, H. (2022, May). <i>Microstructure and Oxidation Behaviour of MoSi₂ Thin Films Grown by DCMS and HiPIMS</i> [Poster Presentation]. 48th International Conference on Metallurgical Coatings and Thin Films, ICMCTF, San Diego, CA, United States of America (the). http://hdl.handle.net/20.500.12708/152975</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/152975
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dc.description.abstract
Refractory transition-metal disilicides (TMSi₂) can be considered as promising candidates to be applied as protective coatings in high-temperature applications as they have attractive combined properties such as high melting point, acceptable mechanical properties and especially high oxidation resistance in air. MoSi₂ exhibits an attractive mix of good mechanical properties and outstanding high-temperature oxidation resistance due to the formation of a protective silicon-based oxide.
In our study, we employed direct current magnetron sputtering (DCMS) and High-power magnetron sputtering (HiPIMS) techniques to synthesize MoSi₂ thin films. We investigated the influence of the deposition parameters on the phase formation and the mechanical properties of the films. Moreover, the oxidation kinetics were analyzed at different temperature regimes up to 1500 °C. The coatings were characterized in terms of chemical composition, phase constitution, and mechanical properties using high-resolution characterization techniques.
en
dc.description.sponsorship
CDG Christian Doppler Forschungsgesellschaft
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dc.language.iso
en
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dc.subject
MoSi₂
en
dc.subject
thin films
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dc.subject
Oxidation Resistance
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dc.subject
Mechanical Properties
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dc.title
Microstructure and Oxidation Behaviour of MoSi₂ Thin Films Grown by DCMS and HiPIMS
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dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
Oerlikon (Switzerland), Switzerland
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dc.contributor.affiliation
Oerlikon (Switzerland), Switzerland
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dc.contributor.affiliation
Plansee (Germany), Germany
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dc.relation.grantno
CDL-SEC
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dc.type.category
Poster Presentation
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tuw.project.title
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchinfrastructure
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie
