<div class="csl-bib-body">
<div class="csl-entry">David, M., Arigliani, E., Dabrowska, A., Lardschneider, A., Sistani, M., Nazzari, D., Disnan, D., Doganlar, I. C., Hoang, H. T., Marschick, G., Detz, H., Schmid, U., Lendl, B., Weber, W. M., Strasser, G., & Hinkov, B. (2022). <i>Low Loss Mid-infrared Plasmonic Waveguides: Extending the Limits of Noble Metals</i> [Poster Presentation]. 2022 MRS Fall Meeting & Exhibit, Boston, United States of America (the). http://hdl.handle.net/20.500.12708/153225</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/153225
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dc.description
Surface plasmon polaritons (SPPS) combine the high-speed capabilities of photonic circuits With the ability of plasmonic confinement below the diffraction limit. In particular, modes supported at (noble) metal/dielectric interfaces in various configurations have gained great attention owing to their prospects for attractive applications. However, considering such plasmonics as an established technology in the visible (VIS) and near-IR spectral range, plasmonic concepts in the mid-IR spectral range are still in their infancy. This significantly hampers addressing emerging mid-IR applications by chip-scale devices, e.g. in real-time liquid sensing experiments or optical free-space communication. Thus, realizing novel device concepts and introducing new materials aims at mimicking VlS/near-IR properties such as wavelength-scale mode confinement and guiding. Succeeding will enable a novel class of photonic integrated circuits (PICS) with breakthrough performance characteristics like compact chip—scale Mach-Zehnder interferometers, monolithic heterodyne detectors or on-chip logic networks. They all strone benefit from
miniaturization and the use of mid-IR wavelengths.
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dc.description.abstract
In this work, we surpass the limitations of traditional noble metal-based plasmonics
by exploiting the approach of surface-leading using two different highly transparent
mid-IR materials leading to different characteristics. In the first part of this work, we
introduce, supported by finite element (FEM) simulations, a new concept of
semiconductor-loaded SPPS (SLSPPS), resulting in experimental low—loss, ultra-
broadband waveguides covering a full octave between 5.6 pm and 11.2 um. This is
obtained by depositing thin Ge-slabs on a gold layer supported by a Si substrate,
allowing to couple and confine mid-IR photons on the wavelength-scale to the Chip-
surface and efficiently guide them for a few millimetres. Germanium combines
multiple advantages including broadband transparency, i.e. low loss, characteristics
throughout the mid-IR spectral range, well—known interface characteristics and
fabrication protocols from its decades of use in micro- and nano—electronics as well
as CMOS compatibility. Its refractive index profile allows the realization of Ge/Au
SLSPP waveguides, where >95% of the mode are guided in the surrounding medium,
making it highly suitable for monolithic chip—scale liquid spectrometers. Moreover,
we exploited previous work on combining high-k dielectrics like Hf02, A|203 and Zr02
with Ge for stabilizing its surface-oxides Geox. We demonstrate that 10 nm of atomic
layer dielectric deposition protects our Ge/Au SLSPP waveguides from being etched
in normal water. This opens the pathway towards bio—sensing applications, where
water is the most relevant background matrix.
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dc.language.iso
en
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dc.subject
Ge
en
dc.subject
plasmonic
en
dc.subject
polymer
en
dc.title
Low Loss Mid-infrared Plasmonic Waveguides: Extending the Limits of Noble Metals
