<div class="csl-bib-body">
<div class="csl-entry">Aguinsky, L. F., Rodrigues, F., Klemenschits, X., Filipovic, L., Hössinger, A., & Weinbub, J. (2022). Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio Structures. In <i>Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)</i> (pp. 40–41). http://hdl.handle.net/20.500.12708/153575</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/153575
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dc.language.iso
en
-
dc.subject
Electrical and Electronic Engineering
-
dc.subject
Condensed Matter Physics
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.subject
Materials Chemistry
-
dc.title
Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio Structures
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.issn
0038-1101
-
dc.description.startpage
40
-
dc.description.endpage
41
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
C6
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tuw.researchTopic.name
Modelling and Simulation
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tuw.researchTopic.value
100
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tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
dc.description.numberOfPages
2
-
tuw.author.orcid
0000-0003-4722-0636
-
tuw.event.name
2022 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)
-
tuw.event.startdate
06-09-2022
-
tuw.event.enddate
08-09-2022
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Granada
-
tuw.event.country
ES
-
tuw.event.presenter
Aguinsky, Luiz Felipe
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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item.openairetype
conference paper
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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item.fulltext
no Fulltext
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item.languageiso639-1
en
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item.cerifentitytype
Publications
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none
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crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
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crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
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crisitem.author.dept
E360 - Institut für Mikroelektronik
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crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
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crisitem.author.dept
E360 - Institut für Mikroelektronik
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crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
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crisitem.author.orcid
0000-0003-4722-0636
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crisitem.author.orcid
0000-0003-1687-5058
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crisitem.author.orcid
0000-0001-5969-1932
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crisitem.author.parentorg
E360 - Institut für Mikroelektronik
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crisitem.author.parentorg
E360 - Institut für Mikroelektronik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
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crisitem.author.parentorg
E360 - Institut für Mikroelektronik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
