<div class="csl-bib-body">
<div class="csl-entry">Lenz, C., Manstetten, P., Hössinger, A., & Weinbub, J. (2022). Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations. In <i>SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet</i> (pp. 117–118). http://hdl.handle.net/20.500.12708/153580</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/153580
-
dc.language.iso
en
-
dc.subject
Electrical and Electronic Engineering
en
dc.subject
Condensed Matter Physics
en
dc.subject
Electronic, Optical and Magnetic Materials
en
dc.subject
Materials Chemistry
en
dc.title
Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.description.startpage
117
-
dc.description.endpage
118
-
dc.type.category
Poster Contribution
-
tuw.booktitle
SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.value
100
-
tuw.linking
https://congresos.ugr.es/sispad2022/
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
dc.description.numberOfPages
2
-
tuw.author.orcid
0000-0003-0716-393X
-
tuw.event.name
2022 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022)
en
tuw.event.startdate
06-09-2022
-
tuw.event.enddate
08-09-2022
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Granada
-
tuw.event.country
ES
-
tuw.event.presenter
Lenz, Christoph
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.languageiso639-1
en
-
item.openairetype
conference poster
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_6670
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.orcid
0000-0001-5969-1932
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
