<div class="csl-bib-body">
<div class="csl-entry">Bahr, A., Glechner, T., Wojcik, T., Kirnbauer, A., Sauer, M., Foelske-Schmitz, A., Hunold, O., Ramm, J., Kolozsvári, S., Ntemou, E., Pitthan, E., Primetzhofer, D., Riedl-Tragenreif, H., & Hahn, R. (2022). Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties. <i>Surface and Coatings Technology</i>, <i>444</i>, 128674. https://doi.org/10.1016/j.surfcoat.2022.128674</div>
</div>
-
dc.identifier.issn
0257-8972
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/153595
-
dc.language.iso
en
-
dc.publisher
ELSEVIER SCIENCE SA
-
dc.relation.ispartof
Surface and Coatings Technology
-
dc.subject
Condensed Matter Physics
-
dc.subject
General Chemistry
-
dc.subject
Surfaces, Coatings and Films
-
dc.subject
Materials Chemistry
-
dc.subject
Surfaces and Interfaces
-
dc.title
Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
128674
-
dc.type.category
Original Research Article
-
tuw.container.volume
444
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
wb.publication.intCoWork
International Co-publication
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
70
-
dcterms.isPartOf.title
Surface and Coatings Technology
-
tuw.publication.orgunit
E308-01 - Forschungsbereich Werkstoffwissenschaft
-
tuw.publication.orgunit
E057E - Fachbereich Analytical Instrumentation Center