DC Field
Value
Language
dc.contributor.author
Schmid, Ulrich
-
dc.contributor.author
Schneider, Michael
-
dc.contributor.author
Leitgeb, Markus
-
dc.contributor.author
Pfusterschmied, Georg
-
dc.date.accessioned
2023-02-21T11:40:27Z
-
dc.date.available
2023-02-21T11:40:27Z
-
dc.date.issued
2022
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Schmid, U., Schneider, M., Leitgeb, M., &#38; Pfusterschmied, G. (2022). <i>SiC Process Technologies for MEMS</i> [Conference Presentation]. MNE 2022 - Eurosensors, Leuven, Belgium.</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/153650
-
dc.language.iso
en
-
dc.subject
SiC
en
dc.subject
Process technologies
en
dc.subject
MEMS
en
dc.title
SiC Process Technologies for MEMS
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
-
tuw.publication.invited
invited
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.author.orcid
0000-0001-9846-7132
-
tuw.author.orcid
0000-0003-1609-4497
-
tuw.event.name
MNE 2022 - Eurosensors
en
tuw.event.startdate
19-09-2022
-
tuw.event.enddate
22-09-2022
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Leuven
-
tuw.event.country
BE
-
tuw.event.presenter
Schmid, Ulrich
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference paper not in proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cp
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.orcid
0000-0003-1609-4497
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
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