<div class="csl-bib-body">
<div class="csl-entry">Hansal, W., Steiner, H., Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., & Svasek, P. (2013). Microgalvanic nickel pulse plating process for the production of thermal actuators. <i>Microsystem Technologies</i>, <i>20</i>(4–5), 681–689. https://doi.org/10.1007/s00542-013-2007-5</div>
</div>
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0946-7076
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http://hdl.handle.net/20.500.12708/156136
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en
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SPRINGER HEIDELBERG
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Microsystem Technologies
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dc.subject
Electrical and Electronic Engineering
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dc.subject
Hardware and Architecture
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dc.subject
Condensed Matter Physics
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dc.subject
Electronic, Optical and Magnetic Materials
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dc.title
Microgalvanic nickel pulse plating process for the production of thermal actuators
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Artikel
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Article
en
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681
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689
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Original Research Article
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20
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Sensor Systems
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Structure-Property Relationship
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Special and Engineering Materials
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Microsystem Technologies
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E366-01 - Forschungsbereich Mikro- und Nanosensorik
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10.1007/s00542-013-2007-5
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1432-1858
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Micro- and Nanoelectronics
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