DC Field
Value
Language
dc.contributor.author
Filipovic, Lado
-
dc.contributor.author
Selberherr, Siegfried
-
dc.contributor.author
Mutinati, Giorgio C.
-
dc.contributor.author
Brunet, Elise
-
dc.contributor.author
Steinhauer, Stephan
-
dc.contributor.author
Köck, Anton
-
dc.contributor.author
Teva, Jordi
-
dc.contributor.author
Kraft, Jochen
-
dc.contributor.author
Siegert, Jörg
-
dc.contributor.author
Schrank, Franz
-
dc.date.accessioned
2023-02-24T08:13:50Z
-
dc.date.available
2023-02-24T08:13:50Z
-
dc.date.issued
2014-04-01
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Filipovic, L., Selberherr, S., Mutinati, G. C., Brunet, E., Steinhauer, S., Köck, A., Teva, J., Kraft, J., Siegert, J., &#38; Schrank, F. (2014). Methods of simulating thin film deposition using spray pyrolysis techniques. <i>Microelectronic Engineering</i>, <i>117</i>, 57–66. https://doi.org/10.1016/j.mee.2013.12.025</div> </div>
-
dc.identifier.issn
0167-9317
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/156140
-
dc.language.iso
en
-
dc.relation.ispartof
Microelectronic Engineering
-
dc.subject
Electrical and Electronic Engineering
-
dc.subject
Condensed Matter Physics
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.subject
Atomic and Molecular Physics, and Optics
-
dc.subject
Surfaces, Coatings and Films
-
dc.title
Methods of simulating thin film deposition using spray pyrolysis techniques
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
57
-
dc.description.endpage
66
-
dc.type.category
Original Research Article
-
tuw.container.volume
117
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
C1
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.name
Computational Materials Science
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
dcterms.isPartOf.title
Microelectronic Engineering
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
tuw.publication.orgunit
E165-01 - Forschungsbereich Physikalische Chemie
-
tuw.publisher.doi
10.1016/j.mee.2013.12.025
-
dc.identifier.eissn
1873-5568
-
dc.description.numberOfPages
10
-
wb.sci
true
-
wb.sciencebranch
Elektrotechnik, Elektronik
-
wb.sciencebranch.oefos
25
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.languageiso639-1
en
-
item.openairetype
research article
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_2df8fbb1
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.dept
TU Wien
-
crisitem.author.dept
E389 - Institute of Telecommunications
-
crisitem.author.dept
E362 - Institut für Festkörperelektronik
-
crisitem.author.dept
AMS (Austria)
-
crisitem.author.orcid
0000-0003-1687-5058
-
crisitem.author.orcid
0000-0002-5583-6177
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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