DC Field
Value
Language
dc.contributor.author
Okorn-Schmidt, Harald F.
-
dc.contributor.author
Holsteyns, Frank
-
dc.contributor.author
Lippert, Alexander
-
dc.contributor.author
Mui, David
-
dc.contributor.author
Kawaguchi, Mark
-
dc.contributor.author
Lechner, Christiane
-
dc.contributor.author
Frommhold, Philipp E.
-
dc.contributor.author
Nowak, Till
-
dc.contributor.author
Reuter, Fabian
-
dc.contributor.author
Piqué, Miquel Banchs
-
dc.contributor.author
Cairós, Carlos
-
dc.contributor.author
Mettin, Robert
-
dc.date.accessioned
2023-02-24T08:21:13Z
-
dc.date.available
2023-02-24T08:21:13Z
-
dc.date.issued
2014-01
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Okorn-Schmidt, H. F., Holsteyns, F., Lippert, A., Mui, D., Kawaguchi, M., Lechner, C., Frommhold, P. E., Nowak, T., Reuter, F., Piqué, M. B., Cairós, C., &#38; Mettin, R. (2014). Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements. <i>ECS Journal of Solid State Science and Technology</i>, <i>3</i>(1), N3069–N3080. https://doi.org/10.1149/2.011401jss</div> </div>
-
dc.identifier.issn
2162-8769
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/156362
-
dc.language.iso
en
-
dc.publisher
ELECTROCHEMICAL SOC INC
-
dc.relation.ispartof
ECS Journal of Solid State Science and Technology
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.title
Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
N3069
-
dc.description.endpage
N3080
-
dc.type.category
Original Research Article
-
tuw.container.volume
3
-
tuw.container.issue
1
-
tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
X1
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
außerhalb der gesamtuniversitären Forschungsschwerpunkte
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.value
40
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
10
-
dcterms.isPartOf.title
ECS Journal of Solid State Science and Technology
-
tuw.publication.orgunit
E322-02 - Forschungsbereich Numerische Strömungsmechanik
-
tuw.publisher.doi
10.1149/2.011401jss
-
dc.identifier.eissn
2162-8777
-
dc.description.numberOfPages
12
-
wb.sci
true
-
wb.sciencebranch
Andere Naturwissenschaften
-
wb.sciencebranch
Sonstige Technische Wissenschaften
-
wb.sciencebranch.oefos
1070
-
wb.sciencebranch.oefos
2119
-
wb.facultyfocus
Außerhalb der primären Forschungsgebiete der Fakultät
de
wb.facultyfocus
Outside the Faculty's primary research activities
en
item.openairetype
Artikel
-
item.openairetype
Article
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.grantfulltext
none
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E322-02 - Forschungsbereich Numerische Strömungsmechanik
-
crisitem.author.orcid
0000-0002-7598-2075
-
crisitem.author.parentorg
E322 - Institut für Strömungsmechanik und Wärmeübertragung
-
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