<div class="csl-bib-body">
<div class="csl-entry">Filipovic, L., Selberherr, S., Mutinati, G. C., Brunet, E., Steinhauer, S., Köck, A., Teva, J., Kraft, J., Siegert, J., Schrank, F., Gspan, C., & Grogger, W. (2014). Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications. <i>IEEE Transactions on Semiconductor Manufacturing</i>, <i>27</i>(2), 269–277. https://doi.org/10.1109/tsm.2014.2298883</div>
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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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IEEE Transactions on Semiconductor Manufacturing
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dc.subject
Electrical and Electronic Engineering
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dc.subject
Condensed Matter Physics
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dc.subject
Electronic, Optical and Magnetic Materials
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Industrial and Manufacturing Engineering
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dc.title
Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications
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269
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277
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Original Research Article
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Modelling and Simulation
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IEEE Transactions on Semiconductor Manufacturing
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E360 - Institut für Mikroelektronik
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10.1109/tsm.2014.2298883
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Micro- and Nanoelectronics
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E360 - Institut für Mikroelektronik
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TU Wien
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E389 - Institute of Telecommunications
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