<div class="csl-bib-body">
<div class="csl-entry">Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. <i>Applied Physics Letters</i>, <i>104</i>(23), 233501. https://doi.org/10.1063/1.4882177</div>
</div>
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en
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AIP PUBLISHING
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Applied Physics Letters
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Physics and Astronomy (miscellaneous)
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dc.title
Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes
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Artikel
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Article
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233501
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Original Research Article
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104
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Sensor Systems
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Structure-Property Relationship
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Special and Engineering Materials
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Applied Physics Letters
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Mikro- und Nanoelektronik
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E366 - Institut für Sensor- und Aktuatorsysteme
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E363 - Institut für Biomedizinische Elektronik
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