Surface properties of AlCuFeB coatings with focus on resolving tribological issues of nanoimprint lithography

Abstract

In recent years extensive research on CMAs (complex metallic alloys) were performed. Among many interesting qualities of complex metallic alloys are its low surface energy and high wear resistance, both making CMA compounds very appealing as a coating layer. The AlCuFeB compound is of particular interest since the addition of boron heps reduce friction forces. nano-imprint lithography as well as other manufacturing techniques need a solution to tackle problems related to stick-slip effects, and damage of molds and substrates, which are all effects of friction and adhesion forces on the interface of contacting materials. Complex metallic alloy compounds could be seen as a possible coating solution, reducing the surface forces, therefore ensuring lower failure rate during the manufacturing process as well as giving opportunity to create more complicated structures. This study focuses on properties of AlCuFeB CMA coatings, explores the possibilities of manufacturing such films, discusses their properties and points to the possible use of this compound in nano-imprint lithography. Most measurements in this study were performed with an atomic force microscope (AFM) acting as a profilometer, tribometer and tool to measure adhesion forces.