<div class="csl-bib-body">
<div class="csl-entry">Schmid, S., Bagci, T., Zeuthen, E., Taylor, J. M., Herring, P. K., Cassidy, M. C., Marcus, C. M., Villanueva, L. G., Amato, B., Boisen, A., Shin, Y. C., Kong, J., Sorensen, A. S., Usami, K., & Polzik, E. S. (2014). Single-layer graphene on silicon nitride micromembrane resonators. <i>Journal of Applied Physics</i>, <i>115</i>(5), Article 054513. https://doi.org/10.1063/1.4862296</div>
</div>
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dc.identifier.issn
0021-8979
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/158074
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dc.description.abstract
Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.
en
dc.language.iso
en
-
dc.relation.ispartof
Journal of Applied Physics
-
dc.subject
General Physics and Astronomy
en
dc.title
Single-layer graphene on silicon nitride micromembrane resonators
en
dc.type
Artikel
de
dc.type
Article
en
dc.contributor.affiliation
Joint Quantum Institute/NIST, College Park, Maryland 20899, USA
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dc.type.category
Original Research Article
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tuw.container.volume
115
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tuw.container.issue
5
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tuw.journal.peerreviewed
true
-
tuw.peerreviewed
true
-
wb.publication.intCoWork
International Co-publication
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tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Special and Engineering Materials
-
tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
25
-
tuw.researchTopic.value
25
-
tuw.researchTopic.value
50
-
dcterms.isPartOf.title
Journal of Applied Physics
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tuw.publication.orgunit
E350 - Fakultät für Elektrotechnik und Informationstechnik
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tuw.publication.orgunit
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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tuw.publisher.doi
10.1063/1.4862296
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dc.date.onlinefirst
2014-02-07
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dc.identifier.articleid
054513
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dc.identifier.eissn
1089-7550
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dc.description.numberOfPages
1
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tuw.author.orcid
0000-0003-3778-7137
-
wb.sci
true
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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item.languageiso639-1
en
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item.cerifentitytype
Publications
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item.fulltext
no Fulltext
-
item.grantfulltext
none
-
item.openairecristype
http://purl.org/coar/resource_type/c_2df8fbb1
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item.openairetype
research article
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
Joint Quantum Institute/NIST, College Park, Maryland 20899, USA