<div class="csl-bib-body">
<div class="csl-entry">Lugstein, A. (2012). <i>Technology and process integration of nanoscale electronic and sensor devices</i> [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/159193</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/159193
-
dc.description
Enth Originalbeitr. u. 13 Veröffentl.
-
dc.format
Getr. Zählung
-
dc.language
English
-
dc.language.iso
en
-
dc.subject
Nanoelektronik
de
dc.subject
Sensor
de
dc.subject
Bauelement
de
dc.subject
Integration
de
dc.subject
Aufsatzsammlung
de
dc.title
Technology and process integration of nanoscale electronic and sensor devices
