<div class="csl-bib-body">
<div class="csl-entry">Wanzenböck, H. (2017). <i>3D Micro- & nanotechnology for microelectronics and beyond : research contributions to materials, processes and devices for 2D and 3D nanosystem architectures</i> [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/159376</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/159376
-
dc.description
Zusammenfassung in deutscher Sprache
-
dc.description
Enthält Originalbeitrag
-
dc.language
English
-
dc.language.iso
en
-
dc.subject
Mikroelektronik
de
dc.subject
Mikrosystemtechnik
de
dc.subject
Nanotechnologie
de
dc.subject
Dimension 3
de
dc.title
3D Micro- & nanotechnology for microelectronics and beyond : research contributions to materials, processes and devices for 2D and 3D nanosystem architectures
