<div class="csl-bib-body">
<div class="csl-entry">Alamin Dow, A. B., Al-Rubaye, H., Koo, D., Schneider, M., Bittner, A., Schmid, U., & Kherani, N. P. (2011). Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), <i>Smart Sensors, Actuators, and MEMS V</i> (pp. 1–7). SPIE. https://doi.org/10.1117/12.885861</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/163114
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dc.description.abstract
Piezoelectric energy microgenerators are devices that continuously generate electricity when they are subjected to
varying mechanical strain due to vibrations. They can generate electrical power up to 100 μW which can be used to drive
various sensing and actuating MEMS devices. Today, piezoelectric energy harvesters are considered autonomous and
reliable energy sources to actuate low power microdevices such as wireless sensor networks, indoor-outdoor monitoring,
facility management and biomedical applications. The advantages of piezoelectric energy harvesters including high
power density, moderate output power and CMOS compatible fabrication in particular with aluminum nitride (AlN) have
fuelled and motivated researchers to develop MEMS based energy harvesters. Recently, the use of AlN as a piezoelectric
material has increased fabrication compatibility, enabling the realization of smart integrated systems on chip which
include sensors, actuators and energy storage. Piezoelectric MEMS energy microgenerator is used to capture and
transform the available ambient mechanical vibrations into usable electric energy via resonant coupling in the thin film
piezoelectric material. Analysis and modeling of piezoelectric energy generators are very important aspects for improved
performance. Aluminum nitride as the piezoelectric material is sandwiched between two electrodes. The device design
includes a silicon cantilever on which the AlN film is deposited and which features a seismic mass at the end of the
cantilever. Beam theory and lumped modeling with circuit elements are applied for modeling and analysis of the device
operation at various acceleration values. The model shows good agreement with the experimental findings, thus giving
confidence in the model.
en
dc.subject
modeling
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dc.subject
AlN
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dc.subject
vibration
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dc.subject
MEMS
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dc.subject
energy harvesting
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dc.subject
piezoelectricity
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dc.title
Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations
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dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Smart Sensors, Actuators, and MEMS V
-
dc.description.startpage
1
-
dc.description.endpage
7
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Smart Sensors, Actuators, and MEMS V
-
tuw.container.volume
8066
-
tuw.relation.publisher
SPIE
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.id
E2
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Special and Engineering Materials
-
tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.name
Sustainable and Low Emission Mobility
-
tuw.researchTopic.name
Sustainable Production and Technologies
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
20
-
tuw.researchTopic.value
15
-
tuw.researchTopic.value
35
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
10
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.publisher.doi
10.1117/12.885861
-
dc.description.numberOfPages
7
-
tuw.event.name
Smart Sensors, Actuators, and MEMS V
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tuw.event.startdate
18-04-2011
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tuw.event.enddate
20-04-2011
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Prag
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tuw.event.country
EU
-
tuw.event.presenter
Alamin Dow, Ali B.
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wb.sciencebranch
Elektrotechnik, Elektronik
-
wb.sciencebranch.oefos
25
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wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.openairetype
Konferenzbeitrag
-
item.openairetype
Inproceedings
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik