<div class="csl-bib-body">
<div class="csl-entry">Haas, T., Zeilmann, C., Bittner, A., & Schmid, U. (2011). Investigation on Micromachining Technologies for the Realization of LTCC Devices and Systems. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), <i>Smart Sensors, Actuators, and MEMS V</i> (pp. 1–6). SPIE. https://doi.org/10.1117/12.887603</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/163120
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dc.description.abstract
Low temperature co-fired ceramics (LTCC) has established as a widespread platform for advanced functional ceramic devices in different applications, such as in the space and aviation sector, for micro machined sensors as well as in micro fluidics. This is due to high reliability, excellent physical properties, especially in the high frequency range, and the possibility to integrate passive components in the monolithic LTCC body, offering the potential for a high degree of miniaturisation.
However, for further improvement of this technology and for an ongoing increase of the integration level, the realization of miniaturized structures is of utmost importance. Therefore, novel techniques for micro-machining are required providing channel structures and cavities inside the glass-ceramic body, enabling for further application scenarios. Those techniques are punching, laser cutting and embossing.
One of the most limitations of LTCC is the poor thermal conductivity. Hence, the possibility to integrate channels enables innovative active cooling approaches using fluidic media for heat critical devices. Doing so, a by far better cooling effect can be achieved than by passive devices as heat spreaders or heat sinks. Furthermore, the realization of mechanic devices as integrated pressure sensors for operation under harsh environmental conditions can be realized by integrating the membrane directly into the ceramic body. Finally, for high power devices substantial improvement can be provided by filling those channel structures with electrical conductive material, so that the resistivity can be decreased
drastically without affecting the topography of the ceramics.
en
dc.subject
LTCC
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dc.subject
active cooling
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dc.subject
microchannels
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dc.subject
sensor applications
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dc.subject
wave guides
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dc.subject
high power applications
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dc.title
Investigation on Micromachining Technologies for the Realization of LTCC Devices and Systems
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dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Smart Sensors, Actuators, and MEMS V
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dc.description.startpage
1
-
dc.description.endpage
6
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
Smart Sensors, Actuators, and MEMS V
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tuw.container.volume
8066
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tuw.relation.publisher
SPIE
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tuw.researchTopic.id
M2
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tuw.researchTopic.id
M7
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tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.id
E2
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.name
Special and Engineering Materials
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tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.name
Sustainable and Low Emission Mobility
-
tuw.researchTopic.name
Sustainable Production and Technologies
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
20
-
tuw.researchTopic.value
15
-
tuw.researchTopic.value
35
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tuw.researchTopic.value
10
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tuw.researchTopic.value
10
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tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.1117/12.887603
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dc.description.numberOfPages
6
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tuw.event.name
Smart Sensors, Actuators, and MEMS V
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tuw.event.startdate
18-04-2011
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tuw.event.enddate
20-04-2011
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Prag
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tuw.event.country
EU
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tuw.event.presenter
Haas, T.
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wb.sciencebranch
Elektrotechnik, Elektronik
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wb.sciencebranch.oefos
25
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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item.fulltext
no Fulltext
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item.openairetype
Konferenzbeitrag
-
item.openairetype
Inproceedings
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.grantfulltext
none
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crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik