<div class="csl-bib-body">
<div class="csl-entry">Ruiz, D., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Gimzewski, J. K., & Sánchez-Rojas, J. L. (2011). Characterization of the first in-plane mode of AlN-actuated microcantilevers. In U. Schmid, J. L. Sánchez-Rojas, & M. Leester-Schaedel (Eds.), <i>Smart Sensors, Actuators, and MEMS V</i> (pp. 1–7). SPIE. https://doi.org/10.1117/12.886981</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/163122
-
dc.description.abstract
The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.
en
dc.language.iso
en
-
dc.subject
AlN
-
dc.subject
MEMS
-
dc.subject
piezoelectric
-
dc.subject
resonators
-
dc.subject
in-plane motion
-
dc.title
Characterization of the first in-plane mode of AlN-actuated microcantilevers
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Smart Sensors, Actuators, and MEMS V
-
dc.description.startpage
1
-
dc.description.endpage
7
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Smart Sensors, Actuators, and MEMS V
-
tuw.container.volume
8066
-
tuw.relation.publisher
SPIE
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.id
E2
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Special and Engineering Materials
-
tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.name
Sustainable and Low Emission Mobility
-
tuw.researchTopic.name
Sustainable Production and Technologies
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
20
-
tuw.researchTopic.value
15
-
tuw.researchTopic.value
35
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
10
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.publisher.doi
10.1117/12.886981
-
dc.description.numberOfPages
7
-
tuw.event.name
Smart Sensors, Actuators, and MEMS V
-
tuw.event.startdate
18-04-2011
-
tuw.event.enddate
20-04-2011
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Prag
-
tuw.event.country
EU
-
tuw.event.presenter
Ruiz, David
-
wb.sciencebranch
Elektrotechnik, Elektronik
-
wb.sciencebranch.oefos
25
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.openairetype
Konferenzbeitrag
-
item.openairetype
Inproceedings
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
