<div class="csl-bib-body">
<div class="csl-entry">Oliver, M. J., Hernando-Garcia, J., Ababneh, A., Seidel, H., Schmid, U., Olivares, J., Iborra, E., Pobedinskas, P., Haenen, K., & Sànchez-Rojas, J. L. (2011). Resonant Piezoelectric AlN-actuated Microcantilevers For Detection Of Antigen/Antibody Interactions. In U. Schmid & J. L. Sánchez-Rojas (Eds.), <i>Smart Sensors, Actuators, and MEMS V</i> (pp. 1–8). SPIE. https://doi.org/10.1117/12.887010</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/163126
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dc.description.abstract
Resonant microcantilevers are widely spread for different applications, such as atomic force microscopy or biosensor devices. The use of piezoelectric films on top of the cantilevers is a very promising technology due to the possibility of implementing an all electrical actuation/detection scheme. Among the different piezoelectric materials, polycrystalline aluminium nitride (AlN) is a very attractive material as, in contrast to typical alternatives such as lead zirconate titanate or zinc oxide, it is fully compatible with standard silicon technology, what facilitates its integration in silicon-based
devices.
In this study, our objective is to use sputter-deposited polycrystalline AlN as the actuation material for cantilever-based biosensors and to study the performance of high frequency modes for bio-detection in liquid media. Our results demonstrate a limit of mass detection of 0.07 ng for a 300x200 μm2 cantilever in liquid media, which represents a value below the mass of a monolayer of IgG on a 300x200 μm2 area.
en
dc.subject
polycrystalline AlN
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dc.subject
piezoelectric cantilevers
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dc.subject
electric measurements
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dc.subject
liquid media
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dc.subject
immunosensor
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dc.title
Resonant Piezoelectric AlN-actuated Microcantilevers For Detection Of Antigen/Antibody Interactions
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dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Smart Sensors, Actuators, and MEMS V
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dc.description.startpage
1
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dc.description.endpage
8
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
Smart Sensors, Actuators, and MEMS V
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tuw.container.volume
8066
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tuw.relation.publisher
SPIE
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tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.id
E2
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.name
Special and Engineering Materials
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tuw.researchTopic.name
Structure-Property Relationship
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.name
Sustainable and Low Emission Mobility
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tuw.researchTopic.name
Sustainable Production and Technologies
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tuw.researchTopic.value
10
-
tuw.researchTopic.value
20
-
tuw.researchTopic.value
15
-
tuw.researchTopic.value
35
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
10
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.1117/12.887010
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dc.description.numberOfPages
8
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tuw.event.name
Smart Sensors, Actuators, and MEMS V
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tuw.event.startdate
18-04-2011
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tuw.event.enddate
20-04-2011
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Prag
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tuw.event.country
EU
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tuw.event.presenter
Oliver, M. J.
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wb.sciencebranch
Elektrotechnik, Elektronik
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wb.sciencebranch.oefos
25
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wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.grantfulltext
none
-
item.fulltext
no Fulltext
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item.openairetype
Konferenzbeitrag
-
item.openairetype
Inproceedings
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item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik