<div class="csl-bib-body">
<div class="csl-entry">Keller, S. S., Gammelgaard, L., Jensen, M. P., Schmid, S., Davis, Z. J., & Boisen, A. (2011). Deposition of biopolymer films on micromechanical sensors. <i>Microelectronic Engineering</i>, <i>88</i>(8), 2297–2299. https://doi.org/10.1016/j.mee.2011.02.093</div>
</div>
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dc.identifier.issn
0167-9317
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/165133
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dc.language.iso
en
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dc.publisher
ELSEVIER
-
dc.relation.ispartof
Microelectronic Engineering
-
dc.subject
Electrical and Electronic Engineering
-
dc.subject
Condensed Matter Physics
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.subject
Atomic and Molecular Physics, and Optics
-
dc.subject
Surfaces, Coatings and Films
-
dc.title
Deposition of biopolymer films on micromechanical sensors
en
dc.type
Artikel
de
dc.type
Article
en
dc.contributor.affiliation
Technical University of Denmark, Denmark
-
dc.contributor.affiliation
Technical University of Denmark, Denmark
-
dc.contributor.affiliation
Technical University of Denmark, Denmark
-
dc.contributor.affiliation
Technical University of Denmark, Denmark
-
dc.contributor.affiliation
Technical University of Denmark, Denmark
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dc.description.startpage
2297
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dc.description.endpage
2299
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dc.type.category
Original Research Article
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tuw.container.volume
88
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tuw.container.issue
8
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true
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true
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M7
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M8
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I8
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Special and Engineering Materials
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tuw.researchTopic.name
Structure-Property Relationship
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
25
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tuw.researchTopic.value
25
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tuw.researchTopic.value
50
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dcterms.isPartOf.title
Microelectronic Engineering
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tuw.publisher.doi
10.1016/j.mee.2011.02.093
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dc.identifier.eissn
1873-5568
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dc.description.numberOfPages
3
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wb.sci
true
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
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wb.facultyfocus.faculty
E350
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en
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research article
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Publications
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crisitem.author.dept
Technical University of Denmark
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crisitem.author.dept
Technical University of Denmark
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crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
