<div class="csl-bib-body">
<div class="csl-entry">Manzaneque, T., Hernando-García, J., Ababneh, A., Seidel, H., Sökmen, Ü., Peiner, E., Schmid, U., & Sánchez-Rojas, J. L. (2010). Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop. In B. Jakoby & M. J. Vellekoop (Eds.), <i>Eurosensor XXIV Conference</i> (pp. 1494–1497). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.400</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/167585
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dc.description.abstract
This report details electronic feedback techniques which allow precise control of the quality factor Q of a two-port piezoelectric
micromechanical resonator device, independent of the ambient operating conditions. A circuit including a microbridge resonator
has been implemented to increase the quality factor of the device. Q amplification has been validated by both time domain and
frequency spectrum measurements. In addition to electrical measurements, a mechanical characterization of the resonator was
carried out by means of a laser vibrometer, which confirmed the increase in Q factor due to the electronic feedback.
Enhancement factors of almost two orders of magnitude were achieved, demonstrating an effective way to improve the
performance of piezoelectric MEMS by a suitable electronic design.
en
dc.language.iso
en
-
dc.relation.ispartofseries
Procedia Engineering
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dc.subject
Industrial and Manufacturing Engineering
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dc.subject
aluminium nitride
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dc.subject
piezoelectric
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dc.subject
micromachined resonators
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dc.subject
Q factor
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dc.subject
velocity feedback
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dc.title
Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Eurosensor XXIV Conference
-
dc.relation.issn
1877-7058
-
dc.description.startpage
1494
-
dc.description.endpage
1497
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Eurosensor XXIV Conference
-
tuw.relation.publisher
Elsevier BV
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M7
-
tuw.researchTopic.id
M8
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.id
E2
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Special and Engineering Materials
-
tuw.researchTopic.name
Structure-Property Relationship
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.name
Sustainable and Low Emission Mobility
-
tuw.researchTopic.name
Sustainable Production and Technologies
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
20
-
tuw.researchTopic.value
15
-
tuw.researchTopic.value
35
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
10
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.1016/j.proeng.2010.09.400
-
dc.description.numberOfPages
4
-
tuw.event.name
Eurosensors XXIV
-
wb.sci
false
-
tuw.event.startdate
05-09-2010
-
tuw.event.enddate
08-09-2010
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
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tuw.event.place
Linz
-
tuw.event.country
AT
-
tuw.event.presenter
Manzaneque, T.
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wb.sciencebranch
Elektrotechnik, Elektronik
-
wb.sciencebranch.oefos
25
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
-
item.languageiso639-1
en
-
item.openairetype
conference paper
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
