Micro assembly in a SEM chamber and the solution for collision prevention

Abstract

As the micro assembly becomes more and more important, it is necessary to make it reliable and expeditious. In this paper the scope is on the micro assembly in the chamber of the scanning electron microscope during which a micro gripper approaches the specimen holder and the micro components positioned on it are picked up. The current design of equipment in the SEM chamber does not allow an assessment of the position in the z-direction that causes that tips of micro grippers could break if they collide with the specimen holder. Here is described the video system consisted of micro camera with the magnifications lenses and mess stripe, which enables accurately watching the approaching to the micro components and exact calculation of the distance between micro gripper and the micro component.