DC Field
Value
Language
dc.contributor.author
Cervenka, Johann
-
dc.contributor.author
Ceric, Hajdin
-
dc.contributor.author
Selberherr, Siegfried
-
dc.contributor.editor
Becker, Thomas
-
dc.contributor.editor
Cané, Carles
-
dc.contributor.editor
Barker, N. Scott
-
dc.date.accessioned
2023-03-10T10:19:19Z
-
dc.date.available
2023-03-10T10:19:19Z
-
dc.date.issued
2007
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Cervenka, J., Ceric, H., &#38; Selberherr, S. (2007). Three-Dimensional Simulation of Sacrificial Etching. In T. Becker, C. Cané, &#38; N. S. Barker (Eds.), <i>Smart Sensors, Actuators, and MEMS III</i> (pp. 452–460). SPIE. https://doi.org/10.1117/12.721979</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/171438
-
dc.title
Three-Dimensional Simulation of Sacrificial Etching
-
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Smart Sensors, Actuators, and MEMS III
-
dc.description.startpage
452
-
dc.description.endpage
460
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Smart Sensors, Actuators, and MEMS III
-
tuw.container.volume
6589
-
tuw.relation.publisher
SPIE
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
C1
-
tuw.researchTopic.name
Modelling and Simulation
-
tuw.researchTopic.name
Computational Materials Science
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
tuw.publisher.doi
10.1117/12.721979
-
dc.description.numberOfPages
9
-
tuw.event.name
International Symposium on Microtechnologies for the New Millennium
-
tuw.event.startdate
02-05-2007
-
tuw.event.enddate
04-05-2007
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Gran Canaria, Spain
-
tuw.event.country
EU
-
tuw.event.presenter
Cervenka, Johann
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
item.openairetype
conference paper
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.orcid
0000-0002-5583-6177
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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