<div class="csl-bib-body">
<div class="csl-entry">Pichler, P., Jüngling, W., Selberherr, S., Guerrero, E., & Pötzl, H. (1985). Simulation of Critical IC-Fabrication Steps. <i>IEEE Transactions on Electron Devices</i>, <i>32</i>(10), 1940–1953. https://doi.org/10.1109/t-ed.1985.22226</div>
</div>
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dc.identifier.issn
0018-9383
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/174372
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dc.language.iso
en
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dc.relation.ispartof
IEEE Transactions on Electron Devices
-
dc.subject
Electrical and Electronic Engineering
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dc.subject
Electronic, Optical and Magnetic Materials
-
dc.title
Simulation of Critical IC-Fabrication Steps
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
1940
-
dc.description.endpage
1953
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dc.type.category
Original Research Article
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tuw.container.volume
32
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tuw.container.issue
10
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tuw.journal.peerreviewed
true
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tuw.peerreviewed
true
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dcterms.isPartOf.title
IEEE Transactions on Electron Devices
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tuw.publication.orgunit
E366 - Institut für Sensor- und Aktuatorsysteme
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tuw.publication.orgunit
E360 - Institut für Mikroelektronik
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tuw.publisher.doi
10.1109/t-ed.1985.22226
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dc.identifier.eissn
1557-9646
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dc.description.numberOfPages
14
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wb.sci
true
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Elektrotechnik, Elektronik
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25
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en
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research article
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restricted
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no Fulltext
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Publications
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http://purl.org/coar/resource_type/c_2df8fbb1
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E360 - Institut für Mikroelektronik
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0000-0002-5583-6177
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
