<div class="csl-bib-body">
<div class="csl-entry">Jüngling, W., Pichler, P., Selberherr, S., Guerrero, E., & Pötzl, H. (1985). Simulation of Critical IC Fabrication Processes Using Advanced Physical and Numerical Methods. <i>IEEE Journal of Solid-State Circuits</i>, <i>20</i>(1), 76–87. https://doi.org/10.1109/jssc.1985.1052279</div>
</div>
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dc.identifier.issn
0018-9200
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http://hdl.handle.net/20.500.12708/174375
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dc.language.iso
en
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dc.relation.ispartof
IEEE Journal of Solid-State Circuits
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dc.subject
Electrical and Electronic Engineering
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dc.title
Simulation of Critical IC Fabrication Processes Using Advanced Physical and Numerical Methods
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Artikel
de
dc.type
Article
en
dc.description.startpage
76
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dc.description.endpage
87
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dc.type.category
Original Research Article
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tuw.container.volume
20
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tuw.container.issue
1
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true
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tuw.peerreviewed
true
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dcterms.isPartOf.title
IEEE Journal of Solid-State Circuits
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tuw.publication.orgunit
E366 - Institut für Sensor- und Aktuatorsysteme
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tuw.publication.orgunit
E360 - Institut für Mikroelektronik
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tuw.publisher.doi
10.1109/jssc.1985.1052279
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dc.identifier.eissn
1558-173X
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12
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true
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Elektrotechnik, Elektronik
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25
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en
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research article
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restricted
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Publications
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http://purl.org/coar/resource_type/c_2df8fbb1
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E360 - Institut für Mikroelektronik
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0000-0002-5583-6177
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
