<div class="csl-bib-body">
<div class="csl-entry">Goebel, B. (2001). <i>Vertical n-channel MOSFETs for extremely high density integration</i> [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/179044</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/179044
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dc.description
Zsfassung in dt. Sprache
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dc.language
English
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dc.language.iso
en
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dc.subject
MOS-FET
de
dc.subject
Dreidimensionale Integration
de
dc.title
Vertical n-channel MOSFETs for extremely high density integration