DC Field
Value
Language
dc.contributor.author
Puchner, Helmut
-
dc.date.accessioned
2023-06-18T05:33:58Z
-
dc.date.issued
2001
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Puchner, H. (2001). <i>Process integration for deep-submicron CMOS technology</i> [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/179690</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/179690
-
dc.description
Enth. 12 Sonderabdr.
-
dc.format
Getr. Zählung
-
dc.language
English
-
dc.language.iso
en
-
dc.title
Process integration for deep-submicron CMOS technology
en
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.contributor.affiliation
TU Wien, Österreich
-
tuw.thesisinformation
Technische Universität Wien
-
dc.type.qualificationlevel
Habilitation
-
dc.identifier.libraryid
AC03379209
-
dc.thesistype
Habilitationsschrift
de
dc.thesistype
Professorial Dissertation
en
item.languageiso639-1
en
-
item.openairetype
thesis
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_46ec
-
crisitem.author.dept
E360 - Institut für Mikroelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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